Single Electrode Capacitive Sensor D-510 for Fine Position Measurement
Non-contact displacement measurement sensor with a resolution of less than 1 nm and a maximum bandwidth of 10 kHz.
The D-510 PISeca is a single-electrode capacitive sensor that achieves a maximum measurement range of 500µm and a resolution of less than 1nm. The sensor probe is easy to install with a LEMO connector. Uniformity of the electric field is ensured by the guard ring electrode, achieving high linearity (maximum 0.1%). When combined with dedicated electronics such as the E-852.10, it enables excellent nanometer-level displacement measurements with both static and dynamic resolution.
- Company：PI Japan
- Price：Other
